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Proceedings Paper

Integrated optical biosensors and biochips based on porous silicon technology
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Paper Abstract

Micro-total-analysis-systems and lab-on-chip are more than promises in lot of social interest applications such as clinical diagnostic or environmental monitoring. There is an increasing demand of new and customized devices with better performances to be used in very specific applications. Nanostructured Porous silicon is a functional material and a versatile platform for the fabrication of integrated optical microsystems to be used in biochemical analysis. Our research activity is focused on the design, the fabrication and the characterization of several photonic porous silicon based structures, which are used in the sensing of specific molecular interactions. To integrate the porous silicon based optical transducer in biochip devices we have modified standard micromachining processes, such as anodic bonding and photo-patterning, in order to make them consistent to the utilization of biological probes.

Paper Details

Date Published: 13 February 2008
PDF: 7 pages
Proc. SPIE 6898, Silicon Photonics III, 68981D (13 February 2008); doi: 10.1117/12.767674
Show Author Affiliations
Ivo Rendina, Institute for Microelectronics and Microsystems (Italy)
Edoardo De Tommasi, Institute for Microelectronics and Microsystems (Italy)
Ilaria Rea, Institute for Microelectronics and Microsystems (Italy)
Univ. of Naples Federico II (Italy)
Lucia Rotiroti, Institute for Microelectronics and Microsystems (Italy)
Univ. of Naples Federico II (Italy)
Luca De Stefano, Institute for Microelectronics and Microsystems (Italy)


Published in SPIE Proceedings Vol. 6898:
Silicon Photonics III
Joel A. Kubby; Graham T. Reed, Editor(s)

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