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Proceedings Paper

Grayscale homogenizers in calcium fluoride
Author(s): Jeffrey Lawrence; Lamarr Simmons; Andrew Stockham; John G. Smith; Gregg Borek; Matthias Cumme; Roman Kleindienst; Peter Weissbrodt
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Paper Abstract

Standard UV materials, such as ArF-grade fused silica, have impurities that lead to low transmittance, high absorption, and fluorescence when exposed to high irradiance. Calcium fluoride (CaF2), on the other hand, is a promising material for use as an optical diffuser for applications at 157nm, 193nm, and 248nm due to its low defect density and high transmission in the deep UV regime. In this paper, we discuss our method for fabricating Gaussian homogenizers in calcium fluoride using a grayscale photolithography process. Refractive microlens array homogenizers and Gaussian homogenizers have been fabricated in CaF2 and tested at 193nm for efficiency and uniformity. Using an excimer laser, uniformity results were obtained for cylindrical lens arrays in tandem and crossed to observe the homogeneity in an imaging configuration and for producing a square output. Efficiency, uniformity, and zero order measurements are provided for the Gaussian homogenizers.

Paper Details

Date Published: 6 February 2008
PDF: 9 pages
Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 68830O (6 February 2008); doi: 10.1117/12.767531
Show Author Affiliations
Jeffrey Lawrence, MEMS Optical, Inc. (United States)
Lamarr Simmons, MEMS Optical, Inc. (United States)
Andrew Stockham, MEMS Optical, Inc. (United States)
John G. Smith, MEMS Optical, Inc. (United States)
Gregg Borek, MEMS Optical, Inc. (United States)
Matthias Cumme, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Roman Kleindienst, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Peter Weissbrodt, JENOPTIK Laser, Optik, Systeme GmbH (Germany)

Published in SPIE Proceedings Vol. 6883:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
Thomas J. Suleski; Winston V. Schoenfeld; Jian Jim Wang, Editor(s)

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