Share Email Print

Proceedings Paper

Simulation and interferometer results of MEMS deformable mirrors
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Various types of large stroke actuators for Adaptive Optics (AO) were simulated individually and as part of a mirror system consisting of actuators bonded to face plates with different boundary conditions. The actuators and faceplate were fabricated using a high aspect ratio process that enables the fabrication of 3-dimensional Micro-Electro-Mechanical System (MEMS) devices. This paper will review simulation results along with measurements of the displacement of the actuators utilizing a white-light interferometer. Both simulations and interferometer scans have shown the ability of the actuators to achieve displacements of 1/3 of the initial gap between the spring layer and the counter electrode.

Paper Details

Date Published: 8 February 2008
PDF: 12 pages
Proc. SPIE 6888, MEMS Adaptive Optics II, 68880R (8 February 2008); doi: 10.1117/12.766886
Show Author Affiliations
Bautista Fernández, Univ. of California, Santa Cruz (United States)
Joel Kubby, Univ. of California, Santa Cruz (United States)

Published in SPIE Proceedings Vol. 6888:
MEMS Adaptive Optics II
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

© SPIE. Terms of Use
Back to Top