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Proceedings Paper

2-nm re-orientation accuracy parallel electronic datum system
Author(s): Xiang-Wen Xiong
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Proc. SPIE 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV, ; doi: 10.1117/12.765687
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Xiang-Wen Xiong, Zhongheng High-Tech Inc. (China)


Published in SPIE Proceedings Vol. 6800:
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Hark Hoe Tan; Jung-Chih Chiao; Lorenzo Faraone; Chennupati Jagadish; Jim Williams; Alan R. Wilson, Editor(s)

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