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Proceedings Paper

Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks
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Paper Abstract

Micro-disk resonators were fabricated using Er doped silicon-rich silicon nitride (SRSN:Er). SRSN:Er thin films are fully CMOS-compatible and show efficient Er3+ luminescence pumped off-resonantly via Si nanoclusters. The high refractive index of SRSN (>2.0 at 1.5 μm) allows freedom in designing compact micro-disk resonators. Micro-disks with two different contents of Er (0.2 at.%, 0.02 at.%) with a diameter of 25 μm were fabricated, and characterized using evanescent coupling using tapered fibers. Whispering gallery modes with Q-factors in excess of 13000 were obtained, and FDTD calculations indicate that much higher values should be possible. Finally, we demonstrate excitation of fundamental whispering gallery mode via off-resonant, top-pumping of the SRSN microdisk.

Paper Details

Date Published: 12 February 2008
PDF: 7 pages
Proc. SPIE 6897, Optoelectronic Integrated Circuits X, 68970O (12 February 2008); doi: 10.1117/12.764327
Show Author Affiliations
Jee Soo Chang, Korea Advanced Institute of Science and Technology (South Korea)
Myung-Ki Kim, Korea Advanced Institute of Science and Technology (South Korea)
Yong-Hee Lee, Korea Advanced Institute of Science and Technology (South Korea)
Jung H. Shin, Korea Advanced Institute of Science and Technology (South Korea)
Gun Yong Sung, Electronics and Telecommunications Research Institute (South Korea)


Published in SPIE Proceedings Vol. 6897:
Optoelectronic Integrated Circuits X
Louay A. Eldada; El-Hang Lee, Editor(s)

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