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Proceedings Paper

Highly integrated microfluidic sensors
Author(s): Dan E. Angelescu; Hua Chen; Jacques Jundt; Helene Berthet; Bruno Mercier; Frederic Marty
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Paper Abstract

We have developed fabrication techniques for creating suspended electrically addressable MEMS structures in microfluidic channels, as well as monolithic integration of sensors within microfluidic devices. As we will demonstrate, creative use of state-of-the-art MEMS fabrication techniques allows the integrated manufacturing of a number of sensors, for simultaneous measurement of, for example, flow velocity, thermal conductivity and normal stress. We will demonstrate the versatility of these techniques with an example of capillary viscosity sensor integrating independent flowrate, temperature, and pressure drop sensors.

Paper Details

Date Published: 13 February 2008
PDF: 9 pages
Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 688607 (13 February 2008); doi: 10.1117/12.764028
Show Author Affiliations
Dan E. Angelescu, Schlumberger-Doll Research (United States)
Hua Chen, Schlumberger-Doll Research (United States)
Jacques Jundt, Schlumberger-Doll Research (United States)
Helene Berthet, Ecole Polytechnique (France)
Bruno Mercier, Groupe ESIEE (France)
Frederic Marty, Groupe ESIEE (France)

Published in SPIE Proceedings Vol. 6886:
Microfluidics, BioMEMS, and Medical Microsystems VI
Wanjun Wang; Claude Vauchier, Editor(s)

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