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Proceedings Paper

Optical field probing in photonic structures by atomic force microscopy combined with optical heterodyne detection
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Paper Abstract

This article presents recent advances in scattering-type near field optical scanning microscopy used as a powerful characterization tool for integrated optics. By significant examples, it is shown that this specific probe microscopy based on an Atomic Force Microscope setup with optical heterodyne detection functionalities allows for in situ quantitative study of the complex field propagating in compact silicon on insulator photonic structures (single channel waveguides, MMI splitters and microdisk resonators).

Paper Details

Date Published: 7 March 2008
PDF: 11 pages
Proc. SPIE 6896, Integrated Optics: Devices, Materials, and Technologies XII, 689616 (7 March 2008); doi: 10.1117/12.763854
Show Author Affiliations
Sylvain Blaize, Institut Charles Delaunay, LNIO, Univ. Technologique de Troyes (France)
Gilles Lérondel, Institut Charles Delaunay, LNIO, Univ. Technologique de Troyes (France)
Aurélien Bruyant, Institut Charles Delaunay, LNIO, Univ. Technologique de Troyes (France)
Renaud Bachelot, Institut Charles Delaunay, LNIO, Univ. Technologique de Troyes (France)
Pascal Royer, Institut Charles Delaunay, LNIO, Univ. Technologique de Troyes (France)


Published in SPIE Proceedings Vol. 6896:
Integrated Optics: Devices, Materials, and Technologies XII
Christoph M. Greiner; Christoph A. Waechter, Editor(s)

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