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Proceedings Paper

Microfabricated implantable flow sensor for medical applications
Author(s): Sheng Liu; Reginald Farrow; James L. Zunino; Hee C. Lim; John Federici; Gordon Thomas
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Paper Abstract

A RF wireless capacitive flow sensor is developed. The sensor has integrated inductor with the flow sensitive capacitors as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied flow. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139 MPa. The sensor has size of 10 mm × 4 mm × 0.5 μm. The sensor integrated two pressure sensors together and designed related to flow 5-20ml/hour. The deflection of different shape of membranes and the parameters of flow sensor sensitivity are discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.

Paper Details

Date Published: 12 February 2008
PDF: 10 pages
Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 688606 (12 February 2008); doi: 10.1117/12.763795
Show Author Affiliations
Sheng Liu, New Jersey Institute of Technology (United States)
Reginald Farrow, New Jersey Institute of Technology (United States)
James L. Zunino, U.S. Army ARDEC (United States)
Hee C. Lim, New Jersey Institute of Technology (United States)
John Federici, New Jersey Institute of Technology (United States)
Gordon Thomas, New Jersey Institute of Technology (United States)


Published in SPIE Proceedings Vol. 6886:
Microfluidics, BioMEMS, and Medical Microsystems VI
Wanjun Wang; Claude Vauchier, Editor(s)

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