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Proceedings Paper

Microfabricated implantable pressure sensor for flow measurement
Author(s): Sheng Liu; Reginald Farrow; James L. Zunino; Hee C. Lim; John Federici; Gordon Thomas
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Paper Abstract

A RF wireless capacitive pressure sensor is developed. The sensor has integrated inductor with the pressure sensitive capacitor as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied pressure. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139MPa. The sensor has size of 10 mm × 4 mm × 0.5 um. The sensor presents a pressure sensitivity of 1.65 MHz/cmH2O in pressure range of 0-20 cmH2O. The deflection of different shape of membranes is discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.

Paper Details

Date Published: 18 February 2008
PDF: 10 pages
Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840I (18 February 2008); doi: 10.1117/12.763740
Show Author Affiliations
Sheng Liu, New Jersey Institute of Technology (United States)
Reginald Farrow, New Jersey Institute of Technology (United States)
James L. Zunino, U.S. Army ARDEC (United States)
Hee C. Lim, New Jersey Institute of Technology (United States)
John Federici, New Jersey Institute of Technology (United States)
Gordon Thomas, New Jersey Institute of Technology (United States)


Published in SPIE Proceedings Vol. 6884:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
Allyson L. Hartzell; Rajeshuni Ramesham, Editor(s)

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