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Proceedings Paper

Reliability of MEMS devices in shock and vibration overload situations
Author(s): Steffen Kurth; Alexey Shaporin; Karla Hiller; Christian Kaufmann; Thomas Gessner
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Paper Abstract

This contribution describes the investigation of the reasons for overload failure and overload reaction based on linear vibration theory by decomposition of the complex reaction into resonant mode reactions and on observation of the reaction. An impulse specific peak deflection (ISPD) is derived as a general characteristic property of a certain shock. It is applicable to predict the mechanical deflection of a certain resonant mode of an arbitrary resonant frequency due to a shock. This is further analyzed and proofed by scanning Laser Doppler interferometer (SLDI) measurement on the example of a Fabry Perot interferometer based tunable infrared filter. The results from ISPD prediction are compared to SLDI measurements and to finite element analysis results.

Paper Details

Date Published: 18 February 2008
PDF: 12 pages
Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 688409 (18 February 2008); doi: 10.1117/12.763617
Show Author Affiliations
Steffen Kurth, Fraunhofer Institute for Reliability and Micro Integration (Germany)
Alexey Shaporin, Chemnitz Univ. of Technology (Germany)
Karla Hiller, Chemnitz Univ. of Technology (Germany)
Christian Kaufmann, Chemnitz Univ. of Technology (Germany)
Thomas Gessner, Fraunhofer Institute for Reliability and Micro Integration (Germany)


Published in SPIE Proceedings Vol. 6884:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
Allyson L. Hartzell; Rajeshuni Ramesham, Editor(s)

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