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Proceedings Paper

Vertically integrated multimode interferometers for 3-D photonic circuits in SOI
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Paper Abstract

We present vertically-integrated multimode interferometers that optically couple between waveguide layers of a three-dimensional photonic circuit. Coupling between these layers can be restricted to certain regions by selectively fabricating a silicon channel between them, resulting in an isolated multimode waveguide section. Simulations reveal that complete coupling between two waveguides that are 2 μm square is achieved over a length of 236 μm, when the separating silicon channel is 1 μm thick. Standard photolithography and etching techniques are used to fabricate a proof-of-concept device consisting of one waveguide coupling into a silicon waveguide that is vertically multimode.

Paper Details

Date Published: 26 February 2008
PDF: 9 pages
Proc. SPIE 6898, Silicon Photonics III, 68980Z (26 February 2008); doi: 10.1117/12.763470
Show Author Affiliations
Chris J. Brooks, McMaster Univ. (Canada)
Andrew P. Knights, McMaster Univ. (Canada)
Paul E. Jessop, McMaster Univ. (Canada)


Published in SPIE Proceedings Vol. 6898:
Silicon Photonics III
Joel A. Kubby; Graham T. Reed, Editor(s)

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