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Proceedings Paper

Line length scalable high power diode laser with power densities > 100kw/cm2 for industrial Si-annealing applications
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Paper Abstract

We present newly developed high power diode laser modules which are performing at outstanding power densities and line uniformity. The combination of recently designed laser diode bars on passive heat sinks and optimized micro-optics results to laser modules with power densities > 100kW/cm2 in a line length of 12mm x 0.1mm. The usage of non periodic structured homogenizers leads to a homogeneity of less than 3% p/v which allows precise heating and annealing applications. The application for such laser lines are hardening, metallization and annealing of different materials. In the presentation we will show results of thin film Si-a annealing process with direct diode laser annealing.

Paper Details

Date Published: 26 February 2008
PDF: 7 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790R (26 February 2008); doi: 10.1117/12.762956
Show Author Affiliations
Markus Revermann, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Andreas Bayer, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Jens Meinschien, LIMO Lissotschenko Mikrooptik GmbH (Germany)


Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Frank Träger; Jan J. Dubowski; Andrew S. Holmes; Michel Meunier; Craig B. Arnold; Hiroyuki Niino, Editor(s)

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