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Proceedings Paper

Multifunctional micro-optical elements for laser beam homogenizing and beam shaping
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Paper Abstract

Refractive, diffractive and reflective micro-optical elements for laser beam shaping and homogenizing have been manufactured and tested. The presented multifunctional optical elements are used for shaping arbitrary laser beam profiles into a variety of geometries like, a homogeneous spot array or line pattern, a laser light sheet or flat-top intensity profiles. The resulting profiles are strongly influenced by the beam properties of the laser and by diffraction and interference effects at the micro-optical elements. We present general design rules for beam shaping and homogenizing. We demonstrate the application of such multifunctional micro-optical elements for a variety of applications from micro-laser machining to laser diagnostic systems.

Paper Details

Date Published: 14 February 2008
PDF: 12 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790Q (14 February 2008); doi: 10.1117/12.762923
Show Author Affiliations
A. Bich, SUSS MicroOptics SA (Switzerland)
J. Rieck, SUSS MicroOptics SA (Switzerland)
C. Dumouchel, SUSS MicroOptics SA (Switzerland)
S. Roth, SUSS MicroOptics SA (Switzerland)
K. J. Weible, SUSS MicroOptics SA (Switzerland)
M. Eisner, SUSS MicroOptics SA (Switzerland)
R. Voelkel, SUSS MicroOptics SA (Switzerland)
M. Zimmermann, Bayerisches Laserzentrum GmbH (Germany)
M. Rank, Bayerisches Laserzentrum GmbH (Germany)
M. Schmidt, Bayerisches Laserzentrum GmbH (Germany)
R. Bitterli, Univ. of Neuchâtel (Switzerland)
N. Ramanan, Univ. of Neuchâtel (Switzerland)
P. Ruffieux, Univ. of Neuchâtel (Switzerland)
T. Scharf, Univ. of Neuchâtel (Switzerland)
W. Noell, Univ. of Neuchâtel (Switzerland)
H.-P. Herzig, Univ. of Neuchâtel (Switzerland)
Nico De Rooij, Univ. of Neuchâtel (Switzerland)

Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Andrew S. Holmes; Michel Meunier; Frank Träger; Craig B. Arnold; Jan J. Dubowski; Hiroyuki Niino, Editor(s)

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