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Proceedings Paper

Pushbroom NIR hyperspectral imager using MOEMS scanning grating chips
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Paper Abstract

"NIR Hyperspectral Imaging" is a universal tool to measure and control chemical properties of objects. The combination of digital imaging and molecular spectroscopy exhibits a great benefit, especially for in- and on-line analysis. However, a wide use is impeded at present due to the expensive and complex system approach. One reason is the high cost of two dimensional InGaAs detector arrays, another one is the special glass that is used in the near infrared NIR. In this paper a new approach for a NIR Imaging spectrometer is presented. The base of the new Pushbroom Hyperspectral Imager is a micromechanical scanning device with an integrated diffraction grating. This MOEMS device is made in a standard SOI fabrication process developed at Fraunhofer IPMS.1 2 3 For the Hyperspectral Imager, a new all-reflective optical system based on a Schiefspiegler setup has been developed. The simulated optical configuration and the achieved performance of the system will be presented.

Paper Details

Date Published: 8 February 2008
PDF: 9 pages
Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 68870E (8 February 2008); doi: 10.1117/12.762904
Show Author Affiliations
Heinrich Grüger, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Thomas Egloff, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Michael Scholles, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Fabian Zimmer, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Michael Müller, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Harald Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)


Published in SPIE Proceedings Vol. 6887:
MOEMS and Miniaturized Systems VII
David L. Dickensheets; Harald Schenk, Editor(s)

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