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Proceedings Paper

Far rear surface focusing of femtosecond laser pulses for dicing display glass plates
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Paper Abstract

A potential method for precise and fast dicing of display glass plates is proposed in this study. This technique facilitates the micromachining of cavities in both front and rear surfaces for a single pass of laser beam. The influences of focusing depth, input pulse energy, and scanning speed of the laser beam are investigated to study the morphology of the front and rear surface cavities. A commercial femtosecond laser with pulse duration of 172 fs, center wavelength of 780 nm, and repetition rate of 1 kHz is used for introducing the cavities.

Paper Details

Date Published: 23 February 2008
PDF: 6 pages
Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 688009 (23 February 2008); doi: 10.1117/12.762807
Show Author Affiliations
Farid Ahmed, Information and Communication Univ. (South Korea)
Chulki Min, Information and Communication Univ. (South Korea)
Man Seop Lee, Information and Communication Univ. (South Korea)
Hitoshi Sekita, Cyber Laser Inc. (Japan)
Tetsumi Sumiyoshi, Cyber Laser Inc. (Japan)
Masanao Kamata, Cyber Laser Inc. (Japan)


Published in SPIE Proceedings Vol. 6880:
Laser-based Micro- and Nanopackaging and Assembly II
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Willem Hoving; Jun Amako, Editor(s)

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