Share Email Print
cover

Proceedings Paper

Precision microfabrication of AlN and Al2O3 ceramics by femtosecond laser ablation
Author(s): Sung Hoon Kim; T. Balasubramani; Ik-Bu Sohn; Yong-Chul Noh; Jongmin Lee; Jee Bum Lee; Sungho Jeong
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The characteristics of femtosecond laser ablation of AlN and Al2O3 for precision microfabrication are studied experimentally. Specifically, the process characteristics during femtosecond laser drilling of microholes with sub-100 μm diameter are investigated for varying laser parameters and beam path designs for trepanning. The accumulation of sub-micrometer size particles within the hole is prevented using a blower and vent system. Through process optimization the microdrilling with good hole quality is achieved.

Paper Details

Date Published: 26 February 2008
PDF: 7 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68791O (26 February 2008); doi: 10.1117/12.762701
Show Author Affiliations
Sung Hoon Kim, Gwangju Institute of Science and Technology (South Korea)
T. Balasubramani, Gwangju Institute of Science and Technology (South Korea)
Ik-Bu Sohn, Gwangju Institute of Science and Technology (South Korea)
Yong-Chul Noh, Gwangju Institute of Science and Technology (South Korea)
Jongmin Lee, Gwangju Institute of Science and Technology (South Korea)
Jee Bum Lee, Chonnam National Univ. Medical School (South Korea)
Sungho Jeong, Gwangju Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Frank Träger; Jan J. Dubowski; Andrew S. Holmes; Michel Meunier; Craig B. Arnold; Hiroyuki Niino, Editor(s)

© SPIE. Terms of Use
Back to Top