Share Email Print

Proceedings Paper

Influence of nanocrystal distribution on electroluminescence from Si+-implanted SiO2 thin films
Author(s): L. Ding; T. P. Chen; M. Yang; F. R. Zhu
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Light emitting diodes (LEDs) based on a metal-oxide-semiconductor-like (MOS-like) structure with Si nanocrystals (nc-Si) embedded in SiO2 have been fabricated with low-energy ion implantation. Under a negative gate voltage as low as ~-5 V, both visible and infrared (IR) electroluminescence (EL) have been observed at room temperature. The EL spectra are found to consist of four Gaussian-shaped luminescence bands with their peak wavelengths at ~460, ~600, ~740, and ~1260 nm, in which the ~600-nm band dominants the spectra. The EL properties have been investigated together with the current transport properties of the Si+-implanted SiO2 films. A systematic study has been carried out on the effect of the Si ion implantation dose and the energy on both the current transport and EL properties. The mechanisms of the origin of the four different EL bands have been proposed and discussed.

Paper Details

Date Published: 13 February 2008
PDF: 9 pages
Proc. SPIE 6898, Silicon Photonics III, 68980H (13 February 2008); doi: 10.1117/12.762617
Show Author Affiliations
L. Ding, Nanyang Technological Univ. (Singapore)
T. P. Chen, Nanyang Technological Univ. (Singapore)
M. Yang, Nanyang Technological Univ. (Singapore)
F. R. Zhu, Institute of Materials Research and Engineering (Singapore)

Published in SPIE Proceedings Vol. 6898:
Silicon Photonics III
Joel A. Kubby; Graham T. Reed, Editor(s)

© SPIE. Terms of Use
Back to Top