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Proceedings Paper

A novel diffractive micro-optical modulator for mobile display applications
Author(s): Sang Kyeong Yun; JongHyeong Song; SeungDo An; InJae Yeo; YoonJoon Choi; YeongGyu Lee; HeungWoo Park; KyuBum Han; HaengSeok Yang; Victor Yurlov; Ihar Shyshkin; Anatoliy Lapchuk; HeeYeoun Kim; JaeWook Jang; JeHong Kyoung; JeongSuong Yang; SangKee Yoon; ChangSu Park; JongPil Cheong; YoungNam Hwang; KiSuk Woo; SeungWon Ryu; SeungWoo Lee; ChongMann Koh; YoungKi Baek; DaeHo Bae; HyunKee Lee; JaeHoon Lee; YungHo Ryu; HaeYeon Hwang; ChungMo Yang; OhkKun Lim; DongHyun Park; SeHwan An; JunHee Bae; SungMin Cho; BackSoon Go; SeokKee Hong; HoPhil Jung; SangJin Kim; KiUn Lee; JiHyun Park; JuHwan Yang; GiYoung Byun; SungHo Byun; YoungJin Cho; ChunGi Kim; JooHong Kim; SunKi Kim; SungIl Lee; WhaHyung Lee; KwanYoung Oh; SungKyung Oh; WooChul Shin; ByungKi Song; ElMostafa Bourim
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Paper Abstract

A diffractive optical modulator has been fabricated based on a micromachining process. Novel properties of its fast response time and dynamics were fully understood and demonstrated for the strong potentials in embedded mobile laser display. Bridged thin film piezo-actuators with so called open mirror diffraction structure has been designed. Optical level package also was achieved to successfully prove its display application qualities. Display circuits and driving logic were developed to finally confirm the single-panel laser display at a 240Hz VGA (640×480). With its efficiency of more than 75% and 13cc volume optical engine with the MEMS-based VGA resolution SOM showed 7 lm brightness at a 1.5W electrical power consumption. Detailed design principle, fabrication, packaging and performances of the invented SOM are described.

Paper Details

Date Published: 21 February 2008
PDF: 11 pages
Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 688702 (21 February 2008); doi: 10.1117/12.762568
Show Author Affiliations
Sang Kyeong Yun, Samsung Electro-Mechanics Co. (South Korea)
JongHyeong Song, Samsung Electro-Mechanics Co. (South Korea)
SeungDo An, Samsung Electro-Mechanics Co. (South Korea)
InJae Yeo, Samsung Electro-Mechanics Co. (South Korea)
YoonJoon Choi, Samsung Electro-Mechanics Co. (South Korea)
YeongGyu Lee, Samsung Electro-Mechanics Co. (South Korea)
HeungWoo Park, Samsung Electro-Mechanics Co. (South Korea)
KyuBum Han, Samsung Electro-Mechanics Co. (South Korea)
HaengSeok Yang, Samsung Electro-Mechanics Co. (South Korea)
Victor Yurlov, Samsung Electro-Mechanics Co. (South Korea)
Ihar Shyshkin, Samsung Electro-Mechanics Co. (South Korea)
Anatoliy Lapchuk, Samsung Electro-Mechanics Co. (South Korea)
HeeYeoun Kim, Samsung Electro-Mechanics Co. (South Korea)
JaeWook Jang, Samsung Electro-Mechanics Co. (South Korea)
JeHong Kyoung, Samsung Electro-Mechanics Co. (South Korea)
JeongSuong Yang, Samsung Electro-Mechanics Co. (South Korea)
SangKee Yoon, Samsung Electro-Mechanics Co. (South Korea)
ChangSu Park, Samsung Electro-Mechanics Co. (South Korea)
JongPil Cheong, Samsung Electro-Mechanics Co. (South Korea)
YoungNam Hwang, Samsung Electro-Mechanics Co. (South Korea)
KiSuk Woo, Samsung Electro-Mechanics Co. (South Korea)
SeungWon Ryu, Samsung Electro-Mechanics Co. (South Korea)
SeungWoo Lee, Samsung Electro-Mechanics Co. (South Korea)
ChongMann Koh, Samsung Electro-Mechanics Co. (South Korea)
YoungKi Baek, Samsung Electro-Mechanics Co. (South Korea)
DaeHo Bae, Samsung Electro-Mechanics Co. (South Korea)
HyunKee Lee, Samsung Electro-Mechanics Co. (South Korea)
JaeHoon Lee, Samsung Electro-Mechanics Co. (South Korea)
YungHo Ryu, Samsung Electro-Mechanics Co. (South Korea)
HaeYeon Hwang, Samsung Electro-Mechanics Co. (South Korea)
ChungMo Yang, Samsung Electro-Mechanics Co. (South Korea)
OhkKun Lim, Samsung Electro-Mechanics Co. (South Korea)
DongHyun Park, Samsung Electro-Mechanics Co. (South Korea)
SeHwan An, Samsung Electro-Mechanics Co. (South Korea)
JunHee Bae, Samsung Electro-Mechanics Co. (South Korea)
SungMin Cho, Samsung Electro-Mechanics Co. (South Korea)
BackSoon Go, Samsung Electro-Mechanics Co. (South Korea)
SeokKee Hong, Samsung Electro-Mechanics Co. (South Korea)
HoPhil Jung, Samsung Electro-Mechanics Co. (South Korea)
SangJin Kim, Samsung Electro-Mechanics Co. (South Korea)
KiUn Lee, Samsung Electro-Mechanics Co. (South Korea)
JiHyun Park, Samsung Electro-Mechanics Co. (South Korea)
JuHwan Yang, Samsung Electro-Mechanics Co. (South Korea)
GiYoung Byun, Samsung Electro-Mechanics Co. (South Korea)
SungHo Byun, Samsung Electro-Mechanics Co. (South Korea)
YoungJin Cho, Samsung Electro-Mechanics Co. (South Korea)
ChunGi Kim, Samsung Electro-Mechanics Co. (South Korea)
JooHong Kim, Samsung Electro-Mechanics Co. (South Korea)
SunKi Kim, Samsung Electro-Mechanics Co. (South Korea)
SungIl Lee, Samsung Electro-Mechanics Co. (South Korea)
WhaHyung Lee, Samsung Electro-Mechanics Co. (South Korea)
KwanYoung Oh, Samsung Electro-Mechanics Co. (South Korea)
SungKyung Oh, Samsung Electro-Mechanics Co. (South Korea)
WooChul Shin, Samsung Electro-Mechanics Co. (South Korea)
ByungKi Song, Samsung Electro-Mechanics Co. (South Korea)
ElMostafa Bourim, Samsung Electro-Mechanics Co. (South Korea)


Published in SPIE Proceedings Vol. 6887:
MOEMS and Miniaturized Systems VII
David L. Dickensheets; Harald Schenk, Editor(s)

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