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Proceedings Paper

Surface microstructures of silica glass by laser-induced backside wet etching
Author(s): H. Niino; Y. Kawaguchi; T. Sato; A. Narazaki; R. Kurosaki
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Paper Abstract

We have investigated a one-step method to fabricate a microstructure on a silica glass plate using laser-induced backside wet etching (LIBWE) upon irradiation with DPSS (diode-pumped solid state) lasers. Well-defined deep microtrenches without crack formations on a fused silica glass plate were fabricated by LIBWE method. As the laser beam of DPSS UV laser at a high repetition rate up to 5 - 100 kHz is scanned on the sample surface with the galvanometer controlled by a computer for flexible operations, galvanometer-based point scanning system is suitable for a rapid prototyping process according to electronic design data in the computer. The behavior of liquid ablation (explosive vaporization) was monitored by impulse pressure detection with a fast-response piezoelectric pressure gauge. LIBWE method is suitable for rapid prototyping and rapid manufacturing of surface microstructuing of silica glass as mask-less exposure system in a conventional atmospheric environment.

Paper Details

Date Published: 14 February 2008
PDF: 9 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790C (14 February 2008); doi: 10.1117/12.762240
Show Author Affiliations
H. Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Y. Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
T. Sato, National Institute of Advanced Industrial Science and Technology (Japan)
A. Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
R. Kurosaki, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Frank Träger; Jan J. Dubowski; Andrew S. Holmes; Michel Meunier; Craig B. Arnold; Hiroyuki Niino, Editor(s)

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