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Proceedings Paper

Anisotropic transformation of the beam quality of DPSS lasers for shaping of a narrow line focus for laser crystallization of Si
Author(s): Mikhail Ivanenko; Alexei Mikhailov; Yuri Miklyaev; Wyacheslaw Grimm; Klaus Bagschik; Andreas Hildebrandt; Vitalij Lissotschenko
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Paper Abstract

Advanced laser crystallization of Si for flat panel displays demands a narrow line-shaped light focus with an ultimately high homogeneity. Key element of LIMO line shaping system is an anisotropic quality transformation of a multimode laser beam, which permits a very good homogenization for the long axis and tight focusing with a large depth of focus for the perpendicular high-quality axis. A prototype system has been built with a 90-W 532-nm DPSS laser. It provides a 59-mm long and down to 8 μm (FWHM) narrow focus with a residual inhomogeneity of only 1% (rms). The focus width is adjustable and its shape can be tuned from a quasi-Gauss to a top-hat intensity distribution. The depth of focus at 90% of the peak intensity DOF0.9I varies from 120 μm for a line width of 8 μm to 275 μm for FWHM = 14 μm. The design of longer lines is in progress at LIMO.

Paper Details

Date Published: 14 February 2008
PDF: 10 pages
Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790P (14 February 2008); doi: 10.1117/12.762091
Show Author Affiliations
Mikhail Ivanenko, LIMO GmbH (Germany)
Alexei Mikhailov, LIMO GmbH (Germany)
Yuri Miklyaev, LIMO GmbH (Germany)
Wyacheslaw Grimm, LIMO GmbH (Germany)
Klaus Bagschik, LIMO GmbH (Germany)
Andreas Hildebrandt, LIMO GmbH (Germany)
Vitalij Lissotschenko, LIMO GmbH (Germany)

Published in SPIE Proceedings Vol. 6879:
Photon Processing in Microelectronics and Photonics VII
David B. Geohegan; Andrew S. Holmes; Michel Meunier; Frank Träger; Craig B. Arnold; Jan J. Dubowski; Hiroyuki Niino, Editor(s)

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