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Proceedings Paper

Design and modeling of nanophotonic beam structures as optical NEMS sensors
Author(s): Chengkuo Lee; Jayaraj Thillaigovindan; Aibin Yu; Rohit Radhakrishnan; Chii-Chang Chen; Ya-Ting Chao; John H. Lau
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Paper Abstract

Silicon photonic crystal (PhC) waveguide based resonator is designed by introducing a micro-cavity within the line defect so as to form the resonant band gap structure for PhC. Free-standing silicon beam comprising this nanophotonic resonator structure is investigated. The output resonant wavelength is sensitive to the shape of air holes and defect length of the micro-cavity. The resonant wavelength shift in the output spectrum is a function of force loading at the center of a suspended beam with PhC waveguide resonator. The sensing capability of this new nanomechanical sensor is derived as that vertical deformation is about 20nm at center and the smallest strain is 0.005% for defect length.

Paper Details

Date Published: 1 February 2008
PDF: 11 pages
Proc. SPIE 6900, Quantum Sensing and Nanophotonic Devices V, 690012 (1 February 2008); doi: 10.1117/12.762049
Show Author Affiliations
Chengkuo Lee, National Univ. of Singapore (Singapore)
Institute of Microelectronics, A*STAR (Singapore)
Jayaraj Thillaigovindan, National Univ. of Singapore (Singapore)
Aibin Yu, Institute of Microelectronics, A*STAR (Singapore)
Rohit Radhakrishnan, National Univ. of Singapore (Singapore)
Chii-Chang Chen, National Central Univ. (Taiwan)
Ya-Ting Chao, Yuan Ze Univ. (Taiwan)
John H. Lau, Institute of Microelectronics, A*STAR (Singapore)

Published in SPIE Proceedings Vol. 6900:
Quantum Sensing and Nanophotonic Devices V
Rengarajan Sudharsanan; Christopher Jelen, Editor(s)

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