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Proceedings Paper

Batch patterning micro circuits and sensors with excimer laser machine
Author(s): Ren Yang; Ralph Pyka; Dennis Kramer; John Mata; Matt Souter; Steven Thompson
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Paper Abstract

This paper will present the direct photo patterning of micro circuits and sensors with a XeCl excimer laser photo ablation system. The working principle and the ablation equipment for photo ablation of conductive thin film on polymer are described. Both large sheets and reel-to-reel webs can be ablated on this excimer laser photo ablation system. The ablation strategies and alignment strategies for the micro circuits and sensors are introduced. The test results show ablation results with high resolution, high throughput, high yield and cost-efficiency. This clearly shows that excimer laser photo ablation of the conductive materials on polymer substrates is a good choice for industrial mass product fabrication of low priced, disposable micro circuit and sensor devices.

Paper Details

Date Published: 23 February 2008
PDF: 9 pages
Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 68800T (23 February 2008); doi: 10.1117/12.761957
Show Author Affiliations
Ren Yang, Tamarack Scientific Co., Inc. (United States)
Ralph Pyka, Tamarack Scientific Co., Inc. (United States)
Dennis Kramer, Tamarack Scientific Co., Inc. (United States)
John Mata, Tamarack Scientific Co., Inc. (United States)
Matt Souter, Tamarack Scientific Co., Inc. (United States)
Steven Thompson, Tamarack Scientific Co., Inc. (United States)


Published in SPIE Proceedings Vol. 6880:
Laser-based Micro- and Nanopackaging and Assembly II
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Willem Hoving; Jun Amako, Editor(s)

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