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Proceedings Paper

Electrical properties of thin epoxy-based polymer layers filled with n-carbon black particles
Author(s): Marta Klanjšek Gunde; Nina Hauptman; Marijan Maček
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Paper Abstract

The change of resistivity of the epoxy-based nanocomposite was studied in dependence on concentration of dispersed nanoparticles. The SU8 negative-tone photoresist was applied for the polymer matrix and the conductive carbon black powder for the fillings. The largest decrease of resistivity was obtained at 2-3 wt% of fillings whereas at loadings higher that 8 wt% it does not decreases further appreciably. The resistivity of the prepared nanocomposites becomes smaller after the UV-exposure. The applied nanofillings change the viscosity of the material but the spin-coating application still remains reliable and was approved to work well for concentrations of at least up to 3 wt%. The addition of nanofillings up to 2 wt% does not destroy the resolution of photolithography as seen on the standard test pattern with line widths from 2 to 10 μm.

Paper Details

Date Published: 26 February 2008
PDF: 8 pages
Proc. SPIE 6882, Micromachining and Microfabrication Process Technology XIII, 68820M (26 February 2008); doi: 10.1117/12.761618
Show Author Affiliations
Marta Klanjšek Gunde, National Institute of Chemistry (Slovenia)
Nina Hauptman, National Institute of Chemistry (Slovenia)
Marijan Maček, Univ. of Ljubljana (Slovenia)

Published in SPIE Proceedings Vol. 6882:
Micromachining and Microfabrication Process Technology XIII
Mary-Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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