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Proceedings Paper

A novel microscanning device
Author(s): Yun-yi Zhou; Chang-cheng Yang
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Paper Abstract

The microscanning technique can improve a detector's capabilities in infrared focal plane array imaging. A common way to realize the microscanning technique is to utilize an actuator to make a reflector swing. Here a novel microscanning device is presented in this paper. The principle is on the condition that a spring subassembly matches the actuator, a reflector swings with high frequency. There are two methods of realizing the novel device. One is that the output of the spring subassembly is set as a variable parameter, so the spring subassembly and other elements make up of a spring system. Controlling the frequency and amplitude of the spring subassembly can realize the microscanning function. The other one is that the output of the spring subassembly is set as an invariable parameter, controlling the rotary acceleration of the reflector can realize the microscanning function. The different controllable modes of the two methods are established. In the two methods, controllable parameters are the rigidity coefficient of the spring, the advance compressing distance of the spring, the distance between the axis of the actuator and the rotary axis of the reflector, the rotary inertia of rotary units. The experiments show that the two methods all can realize the novel device, and the second method is better than the first one.

Paper Details

Date Published: 4 January 2008
PDF: 7 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683614 (4 January 2008); doi: 10.1117/12.760847
Show Author Affiliations
Yun-yi Zhou, Huazhong Institute of Electro-Optics (China)
Chang-cheng Yang, Huazhong Institute of Electro-Optics (China)

Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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