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Proceedings Paper

Microstructured humidity sensors fabricated by glancing angle deposition: characterization and performance evaluation
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Paper Abstract

We have used the glancing angle deposition technique to fabricate highly porous nanostructured optical thin films that act as humidity sensors. The responsiveness and repeatability of these sensors has been investigated for samples stored under different environmental conditions. It has been found that samples stored in air have a more stable performance than those stored in a dry nitrogen environment. It has also been found that annealing impacts the responsiveness of the optical thin film sensors.

Paper Details

Date Published: 9 January 2008
PDF: 11 pages
Proc. SPIE 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV, 68000Y (9 January 2008); doi: 10.1117/12.759533
Show Author Affiliations
Kathleen M. Krause, Univ. of Alberta (Canada)
Andy van Popta, Univ. of Alberta (Canada)
John J. Steele, Univ. of Alberta (Canada)
Jeremy C. Sit, Univ. of Alberta (Canada)
Michael J. Brett, Univ. of Alberta (Canada)
National Institute of Nanotechnology (Canada)


Published in SPIE Proceedings Vol. 6800:
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Hark Hoe Tan; Jung-Chih Chiao; Lorenzo Faraone; Chennupati Jagadish; Jim Williams; Alan R. Wilson, Editor(s)

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