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Proceedings Paper

Confocal microscopy scanned by digital micromirror device with stray light filters
Author(s): Chuan-Cheng Hung; Chang-Ching Lin; Koung-Ming Yeh; Yi-Chin Fang; Jia-Hua Wu; Hung-Chi Sun; Wei-Chi Lai; Yi-Liang Chen
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Paper Abstract

This research proposes a newly developed stray light filter, which might significantly eliminate the stray light and ghost image effect for the non-contact con-focal microscopy system handled by (Digital Micromirror Device, DMD) devise. DMD devise, which was introduced by Taxes instrument under advanced technology of Micro-Electro-Mechanical Systems, MEMS, could be the replacement of traditional scanning system. The employment of DMD system takes advantages of fast scanning rate, better resolution, simplifies optical system. However, traditional confocal microscopy system with pinhole will lead to light starving and potentially higher signal to noise ratio. Without pinhole, the stray light and ghost image effect might complicate the signal measurement. A newly developed stray light filter will be presented in this research in order to eliminate the potential stray light and ghost image without sacrifice of luminance. It indicated that not only optical system could be much simplified but also resolution could be one step higher because neither pinhole nor CCD camera lens will be employed in this system. Experimental results will be shown in this research demonstrating an increase in contrast up to 60%.

Paper Details

Date Published: 19 February 2008
PDF: 11 pages
Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840T (19 February 2008); doi: 10.1117/12.758830
Show Author Affiliations
Chuan-Cheng Hung, Kao Yuan Univ. (Taiwan)
Chang-Ching Lin, Metal Industries Research and Development Ctr. (Taiwan)
Koung-Ming Yeh, Metal Industries Research and Development Ctr. (Taiwan)
Yi-Chin Fang, Kaohsiung First Univ. of Science and Technology (Taiwan)
Jia-Hua Wu, Kaohsiung First Univ. of Science and Technology (Taiwan)
Hung-Chi Sun, Kaohsiung First Univ. of Science and Technology (Taiwan)
Wei-Chi Lai, Kaohsiung First Univ. of Science and Technology (Taiwan)
Yi-Liang Chen, Kaohsiung First Univ. of Science and Technology (Taiwan)


Published in SPIE Proceedings Vol. 6884:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
Allyson L. Hartzell; Rajeshuni Ramesham, Editor(s)

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