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Proceedings Paper

Mechanical characteristics of filter structures for MEMS adaptive infrared detectors
Author(s): H. Huang; S. Liu; J. M. Dell; L. Faraone
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Paper Abstract

This paper reports the mechanical design and optimization of tunable Fabry-Perot (FP) filter structures for the development of MEMS adaptive infrared detectors using finite element modeling and experimental investigations. The results indicate that the mechanical characteristics of the FP filters are significantly influenced by the structural designs, which eventually affect the filter performance and device integrity.

Paper Details

Date Published: 9 January 2008
PDF: 8 pages
Proc. SPIE 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV, 68000R (9 January 2008); doi: 10.1117/12.758816
Show Author Affiliations
H. Huang, The Univ. of Queensland (Australia)
S. Liu, The Univ. of Queensland (Australia)
J. M. Dell, The Univ. of Western Australia (Australia)
L. Faraone, The Univ. of Western Australia (Australia)


Published in SPIE Proceedings Vol. 6800:
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Hark Hoe Tan; Jung-Chih Chiao; Lorenzo Faraone; Chennupati Jagadish; Jim Williams; Alan R. Wilson, Editor(s)

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