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Proceedings Paper

Fabrication of sub-wavelength periodic structures upon high-refractive-index glasses by precision glass molding
Author(s): T. Mori; K. Hasegawa; T. Hatano; H. Kasa; K. Kintaka; J. Nishii
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Paper Abstract

One-dimensional surface-relief gratings were fabricated using a direct imprinting process with a glassy carbon (GC) mold at the softening temperatures of oxide glasses. The maximum grating height attained in this study was 730 nm when the grating period was 500 nm, which could be formed by the pressing at the softening temperature of glass under constant pressure of 0.4 kN/cm2. A large area glass imprinting was attempted using a GC mold with a periodic patterned area of 6 mm x 6 mm, which has the period of 500 nm and groove depth of 350 nm, respectively. Phase retardation of 0.1 λ was recognized between TE-polarized and TM-polarized lights at 600 nm wavelength. The measured values were in excellent agreement with those calculated using a rigorous coupled wave analysis.

Paper Details

Date Published: 9 January 2008
PDF: 10 pages
Proc. SPIE 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV, 68000M (9 January 2008); doi: 10.1117/12.758716
Show Author Affiliations
T. Mori, Konica Minolta Opto, Inc. (Japan)
K. Hasegawa, Konica Minolta Opto, Inc. (Japan)
T. Hatano, Konica Minolta Opto, Inc. (Japan)
H. Kasa, National Institute of Advanced Industrial Science and Technology (Japan)
K. Kintaka, National Institute of Advanced Industrial Science and Technology (Japan)
J. Nishii, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6800:
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Hark Hoe Tan; Jung-Chih Chiao; Lorenzo Faraone; Chennupati Jagadish; Jim Williams; Alan R. Wilson, Editor(s)

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