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Proceedings Paper

Characterizations of microcantilever chemical sensors based on SOI material
Author(s): Fangrong Hu; Dajia Wang; Chuankai Qiu; Aina Wang; Hongtao Gao; Jun Yao
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Paper Abstract

This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel.

Paper Details

Date Published: 4 January 2008
PDF: 9 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360S (4 January 2008); doi: 10.1117/12.758232
Show Author Affiliations
Fangrong Hu, Institute of Optics and Electronics (China)
Guilin Univ. of Electronic Technology (China)
Dajia Wang, Institute of Optics and Electronics (China)
Chuankai Qiu, Institute of Optics and Electronics (China)
Aina Wang, Institute of Optics and Electronics (China)
Hongtao Gao, Institute of Optics and Electronics (China)
Jun Yao, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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