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Proceedings Paper

Improvement on thickness uniformity of large-area DLC thin films deposited by femtosecond pulsed laser
Author(s): Jinfan Liu; Guangzhi Zhang; Xiao Yuan
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Paper Abstract

A off-axis deposition method, which aligns the edge of the substrate to the normal of the plasma plume and makes the edge of the plasma plume at the center of the substrate, is used to deposit large-area DLC films. The distance between the target and the substrate and the deposition time are optimized to obtain uniform and large area DLC films on the K9, fused silica glasses and ZnS with the diameter of 50 mm. It is shown that the thickness uniformity of the films with off-axis deposition method is much better than that with the on-axis method. The thickness uniformity for off-axis and on-axis deposition is compared, and the possibility for preparing large-area uniform films is discussed. In addition, the transmission of ZnS with DLC coated is improved.

Paper Details

Date Published: 4 January 2008
PDF: 5 pages
Proc. SPIE 6831, Nanophotonics, Nanostructure, and Nanometrology II, 68310I (4 January 2008); doi: 10.1117/12.757987
Show Author Affiliations
Jinfan Liu, Huazhong Univ. of Science and Technology (China)
High Speed Aerodynamics Institute of China (China)
Guangzhi Zhang, Huazhong Univ. of Science and Technology (China)
Xiao Yuan, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 6831:
Nanophotonics, Nanostructure, and Nanometrology II
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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