Share Email Print
cover

Proceedings Paper

Confocal microscopy for visualization and characterization of porous silicon samples
Author(s): Petronela Doia; A. Petris; I. Dancus; V. I. Vlad
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We have developed a scanning confocal microscopy (SCM) system which can be used to investigate micro-structural properties of samples with micro-geometry. We present advantages of this imaging technique for visualization and characterization of some periodic and non-periodic (porous silicon with an alveolar columnar structure (1.5 - 3 μm pores diameters)) samples. Using the confocal microscopy, we can obtain an enhancement of image resolution and contrast, in comparison with conventional optical microscopy. Therefore, it has particular advantages for the study of porous silicon. Confocal imaging method permit the "optical sectioning" of samples and lead to a sub-micron resolution both in lateral plane and axial plane.

Paper Details

Date Published: 1 August 2007
PDF: 6 pages
Proc. SPIE 6785, ROMOPTO 2006: Eighth Conference on Optics, 67850T (1 August 2007); doi: 10.1117/12.757841
Show Author Affiliations
Petronela Doia, National Institute for Lasers, Plasma and Radiation Physics (Romania)
A. Petris, National Institute for Lasers, Plasma and Radiation Physics (Romania)
I. Dancus, National Institute for Lasers, Plasma and Radiation Physics (Romania)
V. I. Vlad, National Institute for Lasers, Plasma and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 6785:
ROMOPTO 2006: Eighth Conference on Optics

© SPIE. Terms of Use
Back to Top