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Proceedings Paper

An active interconnecting mechanism for free-space optic applications
Author(s): Ping Zhang; Kevin Le; Lun-Chen Hsu; Praveen Pandojirao-Sunkojirao; Smitha Malalur-Nagaraja-Rao; J.-C. Chiao
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Paper Abstract

In this paper, a new method for interconnecting free-space micro-optoelectromechanical system (MOEMS) devices is developed. The heterogeneous design and assembly concept is demonstrated by a pair of V-shape actuators and related assembly mechanism, fabricated on a silicon-on-insulator (SOI) wafer. A two-channel free-space DWDM filter has been assembled and characterized. The results show low insertion losses. The device architecture allows hybrid optical system integration on a single platform. The assembled optical devices can be made of different materials, on different substrates and/or with incompatible fabrication techniques. The integration platform provides potentials for realizing a micro optical bench with equivalent optical performance that currently require bulk optics setups.

Paper Details

Date Published: 29 November 2007
PDF: 7 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683604 (29 November 2007); doi: 10.1117/12.757799
Show Author Affiliations
Ping Zhang, The Univ. of Texas at Arlington (United States)
Kevin Le, The Univ. of Texas at Arlington (United States)
Lun-Chen Hsu, The Univ. of Texas at Arlington (United States)
Praveen Pandojirao-Sunkojirao, The Univ. of Texas at Arlington (United States)
Smitha Malalur-Nagaraja-Rao, The Univ. of Texas at Arlington (United States)
J.-C. Chiao, The Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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