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Proceedings Paper

Nanometrology based on white-light spectral interferometry in thickness measurement
Author(s): Huifang Chen; Tao Liu; Zhijun Meng
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Paper Abstract

A new white-light interferometric technique using in measurement of thickness based on the theory of spectral-domain interference is specified in the paper. The theory of spectral-domain interference broke the limitation of coherence length in interferometry, and gain a much longer measuring range than in time-domain. The optical fiber was applied to Michelson interferometer with the advantage of much convenience of system design. Spectrometer is used to get the spectral-domain signal. With a simple arithmetic, the optical path difference which is related to some parameter could be acquired. A thickness measuring system is designed. The measuring range could be calculated, the error could be forecasted. The simulated result indicats the error of white-light spectral interferometry can be controlled within several nanometers.

Paper Details

Date Published: 4 January 2008
PDF: 4 pages
Proc. SPIE 6831, Nanophotonics, Nanostructure, and Nanometrology II, 683108 (4 January 2008); doi: 10.1117/12.757777
Show Author Affiliations
Huifang Chen, China Jiliang Univ. (China)
Tao Liu, China Jiliang Univ. (China)
Zhijun Meng, China Jiliang Univ. (China)

Published in SPIE Proceedings Vol. 6831:
Nanophotonics, Nanostructure, and Nanometrology II
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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