Share Email Print

Proceedings Paper

Research on wave plate error of polarized laser interferometer
Author(s): Li Duan; Jun Yang; Zh-ihai Liu; Li-bo Yuan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Based on Jones matrices theory, the error source and action mechanism of polarized interferometer using four-channel orthogonal signals in nanometer level measurement are researched. It opens a door for selecting optical components, adjusting light set-up and compensating error.The mechanism of nonlinear errors and the variance law of nonlinear errors in laser interferometer, which is caused by nonideal factors of 1/4 wave plates or 1/2 wave plate or all of them, based on polarized phase-shift technology. In this paper, every single error on the polarized interferometer is discussed with the isolation of each wave plate, so that the character of nonlinear error will be reached with composite error. In the experiments, difference delay angle error of two 1/4 wave plates and location angle error is -5°∼5°in interferometer. The aim of this paper is to realize the mechanism of nonlinear errors and the varying rule of nonlinear errors in laser interferometer. All above provide error remove or compensation for laser interferometer in nanometer level measurement with theoretical foundation and search after application.

Paper Details

Date Published: 11 January 2008
PDF: 9 pages
Proc. SPIE 6830, Advanced Sensor Systems and Applications III, 68301U (11 January 2008); doi: 10.1117/12.757506
Show Author Affiliations
Li Duan, Harbin Engineering Univ. (China)
Jun Yang, Harbin Engineering Univ. (China)
Zh-ihai Liu, Harbin Engineering Univ. (China)
Li-bo Yuan, Harbin Engineering Univ. (China)

Published in SPIE Proceedings Vol. 6830:
Advanced Sensor Systems and Applications III
Yun-Jiang Rao; Yanbiao Liao; Gang-Ding Peng, Editor(s)

© SPIE. Terms of Use
Back to Top