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Proceedings Paper

Diamond-like carbon films deposited by femtosecond laser pulses
Author(s): Yanlong Guo; Xiao Yuan; Shuyun Wang; Changyong Lu; Xiaobing Wang; Yong Cheng; Haiyuan Cao; Xu Liu
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Paper Abstract

Hydrogen-free DLC films has been deposited by femtosecond laser pulse onto (1 0 0) p-type silicon substrates. The laser used for deposition has a pulse energy from 0.4mJ to1.6mJ and pulse width of about 50 fs with the repetition rate of 1 kHz. The laser intensities on the target are from 0.7×1014W/cm2 to 2.8×1014W/cm2. Uniform and wear-resistant DLC films is deposited with fs laser ablating a high purity graphite target at room temperature in vacuum. It is shown that the films has a good hardness ranged from 20 GPa to 30 GPa. Raman spectroscopy, X-ray Photoelectron Spectroscopy and micro-hardness are used to analyze the comprehensive performance of the films, and the results show that the films deposited at the laser intensity of 1.4×1014W/cm2 has better hardness and a higher sp3 content. The sp3 fraction of the films is estimated to be as high as 45.6%.

Paper Details

Date Published: 1 February 2008
PDF: 5 pages
Proc. SPIE 6825, Lasers in Material Processing and Manufacturing III, 68250N (1 February 2008); doi: 10.1117/12.757418
Show Author Affiliations
Yanlong Guo, Huazhong Univ. of Science and Technology (China)
Wuhan Ordnance Non-Commissioned Officers Academy (China)
Xiao Yuan, Huazhong Univ. of Science and Technology (China)
Shuyun Wang, Wuhan Ordnance Non-Commissioned Officers Academy (China)
Changyong Lu, Wuhan Ordnance Non-Commissioned Officers Academy (China)
Xiaobing Wang, Wuhan Ordnance Non-Commissioned Officers Academy (China)
Yong Cheng, Wuhan Ordnance Non-Commissioned Officers Academy (China)
Haiyuan Cao, Wuhan Ordnance Non-Commissioned Officers Academy (China)
Xu Liu, Wuhan Ordnance Non-Commissioned Officers Academy (China)


Published in SPIE Proceedings Vol. 6825:
Lasers in Material Processing and Manufacturing III
ShuShen Deng; Akira Matsunawa; Xiao Zhu, Editor(s)

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