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Proceedings Paper

Key techniques in an absolute measurement method of spherical lens
Author(s): Shuo Wu; Tao geng Zhou; Ding guo Sha; Jia ming Lin; Lin feng Chen
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Paper Abstract

An absolute measurement method of spherical lens with Fiber Point Diffraction Interferometer (FPDI) was developed. To achieve a high accuracy, several key techniques are discussed such as: short coherence length laser, interferogram collecting, experiment set up, and reconstruction of wave front. Through these techniques an experiment system has been built. The 5-step phase shifting interferograms are collected. The wave front is fitted by Zernike polynomials and reconstructed. The repeated measurement result has a good performance compared to a Zygo GPI interferometer.

Paper Details

Date Published: 28 November 2007
PDF: 9 pages
Proc. SPIE 6834, Optical Design and Testing III, 683435 (28 November 2007); doi: 10.1117/12.757044
Show Author Affiliations
Shuo Wu, Beijing Institute of Technology (China)
Tao geng Zhou, Beijing Institute of Technology (China)
Ding guo Sha, Beijing Institute of Technology (China)
Jia ming Lin, Beijing Institute of Technology (China)
Lin feng Chen, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 6834:
Optical Design and Testing III
Yongtian Wang; Theo T. Tschudi; Jannick P. Rolland; Kimio Tatsuno, Editor(s)

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