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Proceedings Paper

An optical method of online measurement for the thickness of thin films
Author(s): Min Song; Yaru Zheng; Yongjun Lu; Yanling Qu
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Paper Abstract

This paper introduced an optical method for measuring the thickness of solid thin films. This method is of high measuring speed, noncontact and online work. An experimental system has been constructed for on-line measurement of the thickness of thin film. The experimental results show that the measuring error is lower than 10% in the range of 10~100μm , which fit the production need.

Paper Details

Date Published: 28 November 2007
PDF: 6 pages
Proc. SPIE 6834, Optical Design and Testing III, 683433 (28 November 2007); doi: 10.1117/12.756978
Show Author Affiliations
Min Song, Dalian Nationality Univ. (China)
Yaru Zheng, Liaoning Normal Univ. (China)
Yongjun Lu, Dalian Nationality Univ. (China)
Yanling Qu, Dalian Nationality Univ. (China)

Published in SPIE Proceedings Vol. 6834:
Optical Design and Testing III
Yongtian Wang; Theo T. Tschudi; Jannick P. Rolland; Kimio Tatsuno, Editor(s)

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