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Proceedings Paper

A digital optical autocollimation method for measuring 2D small angle
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Paper Abstract

A recognizing and sub-pixel locating algorithm of a crosshair image and a calibrating method of the setup are studied. A sub-pixel locating accuracy and 2" within the full range are achieved. The crosshair captured with a CCD camera was processed and calculated by a computer. The gray values of each cross section of each line were fitted to Gaussian curve with the least squares method, the central points of the curves were fitted to a line with the same method, the intersections of two pair of lines were obtained and 2D displacement in pixels was figured out. With the precision stage and HP5528A dual-frequency laser interferometer, the setup within the full range was calibrated with piecewise linear interpolation method. Eye fatigue and errors by eye sighting and reading are eliminated and measuring efficiency is raised greatly. It is suitable for NC machine stage precision measurement and stage error automatic compensation.

Paper Details

Date Published: 28 November 2007
PDF: 9 pages
Proc. SPIE 6834, Optical Design and Testing III, 683431 (28 November 2007); doi: 10.1117/12.756858
Show Author Affiliations
Lulu Ma, Beijing Institute of Machinery (China)
Bixi Yan, Beijing Institute of Machinery (China)
Naiguang Lu, Beijing Institute of Machinery (China)


Published in SPIE Proceedings Vol. 6834:
Optical Design and Testing III
Yongtian Wang; Theo T. Tschudi; Jannick P. Rolland; Kimio Tatsuno, Editor(s)

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