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Proceedings Paper

Characterization of surface relief gratings of submicron period
Author(s): P. C. Logofătu; D. Apostol; Marie-Claude Castex; Ileana Apostol; V. Damian; Iuliana Iordache; Raluca Müller
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Paper Abstract

This paper deals with optical characterization of photo-polymer gratings for parameter control. The gratings were obtained using the photoinduced single step inscription of refractive optical elements technique. The optical characterization was done by measuring the specular and diffracted orders of a laser beam incident on the grating. This technique is specifically known as scatterometry. The laser was a He-Ne with 633 nm wavelength. The measured diffraction efficiencies contain information about the parameters to be determined of the grating, such as pitch, linewidth and shape of the ridges.

Paper Details

Date Published: 1 August 2007
PDF: 9 pages
Proc. SPIE 6785, ROMOPTO 2006: Eighth Conference on Optics, 67851V (1 August 2007); doi: 10.1117/12.756800
Show Author Affiliations
P. C. Logofătu, National Institute for Lasers, Plasma and Radiation Physics (Romania)
D. Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Marie-Claude Castex, Lab. de Physique des Lasers, Univ. Paris-Nord (France)
Ileana Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
V. Damian, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Iuliana Iordache, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Raluca Müller, National Institute in Microtechnologies (Romania)


Published in SPIE Proceedings Vol. 6785:
ROMOPTO 2006: Eighth Conference on Optics
Valentin I. Vlad, Editor(s)

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