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Proceedings Paper

Research on the measuring technology of minute part's geometrical parameter based on image processing
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Paper Abstract

The measuring technology of minute part's geometrical parameter based on image processing is an integration of optics, the mechanics, electronics, calculation and control. Accomplishing the video alteration of measuring microscope, real-time gathering image with CCD, and compiling automatically measuring software in Visual C++6.0 environment. First to do image processing which includes denoise filter, illuminance non-uniformity adjustment and image enhancement, then to carry on the on-line automatic measuring to its geometry parameters. By measuring the minute part's geometry parameters of machineries and integrated circuit in this system, the experimental results indicate that the measuring accuracy could amount to 1 micron, and the system survey stability and usability are all good.

Paper Details

Date Published: 29 November 2007
PDF: 8 pages
Proc. SPIE 6833, Electronic Imaging and Multimedia Technology V, 68332L (29 November 2007); doi: 10.1117/12.756490
Show Author Affiliations
Xiao-yan Jia, Guilin Univ. of Electronic Technology (China)
Ze-xin Xiao, Guilin Univ. of Electronic Technology (China)


Published in SPIE Proceedings Vol. 6833:
Electronic Imaging and Multimedia Technology V
Liwei Zhou; Chung-Sheng Li; Minerva M. Yeung, Editor(s)

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