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Proceedings Paper

Research of curved-surface whirl coating and photoresist thickness measurement
Author(s): Long Jiang Chen; GuoGuang Yang; YiYong Liang
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Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68361B; doi: 10.1117/12.756481
Show Author Affiliations
Long Jiang Chen, ZheJiang Univ. (China)
GuoGuang Yang, ZheJiang Univ. (China)
YiYong Liang, ZheJiang Univ. (China)


Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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