Share Email Print

Proceedings Paper

Research of curved-surface whirl coating and photoresist thickness measurement
Author(s): Long Jiang Chen; GuoGuang Yang; YiYong Liang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68361B; doi: 10.1117/12.756481
Show Author Affiliations
Long Jiang Chen, ZheJiang Univ. (China)
GuoGuang Yang, ZheJiang Univ. (China)
YiYong Liang, ZheJiang Univ. (China)

Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

© SPIE. Terms of Use
Back to Top