Share Email Print
cover

Proceedings Paper

Design and fabrication of multimode interference couplers based on digital micro-mirror system
Author(s): Sumei Wu; Xingdao He; Chenbo Shen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Multimode interference (MMI) couplers, based on the self-imaging effect (SIE), are accepted popularly in integrated optics. According to the importance of MMI devices, in this paper, we present a novel method to design and fabricate MMI couplers. A technology of maskless lithography to make MMI couplers based on a smart digital micro-mirror device (DMD) system is proposed. A 1×4 MMI device is designed as an example, which shows the present method is efficient and cost-effective.

Paper Details

Date Published: 4 January 2008
PDF: 8 pages
Proc. SPIE 6832, Holography and Diffractive Optics III, 68321Z (4 January 2008); doi: 10.1117/12.756174
Show Author Affiliations
Sumei Wu, Nanchang Hangkong Univ. (China)
Xingdao He, Nanchang Hangkong Univ. (China)
Chenbo Shen, Zhejiang Public Information Ltd. Co. (China)


Published in SPIE Proceedings Vol. 6832:
Holography and Diffractive Optics III
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu, Editor(s)

© SPIE. Terms of Use
Back to Top