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Proceedings Paper

Design and fabrication of multimode interference couplers based on digital micro-mirror system
Author(s): Sumei Wu; Xingdao He; Chenbo Shen
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Paper Abstract

Multimode interference (MMI) couplers, based on the self-imaging effect (SIE), are accepted popularly in integrated optics. According to the importance of MMI devices, in this paper, we present a novel method to design and fabricate MMI couplers. A technology of maskless lithography to make MMI couplers based on a smart digital micro-mirror device (DMD) system is proposed. A 1×4 MMI device is designed as an example, which shows the present method is efficient and cost-effective.

Paper Details

Date Published: 4 January 2008
PDF: 8 pages
Proc. SPIE 6832, Holography and Diffractive Optics III, 68321Z (4 January 2008); doi: 10.1117/12.756174
Show Author Affiliations
Sumei Wu, Nanchang Hangkong Univ. (China)
Xingdao He, Nanchang Hangkong Univ. (China)
Chenbo Shen, Zhejiang Public Information Ltd. Co. (China)

Published in SPIE Proceedings Vol. 6832:
Holography and Diffractive Optics III
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu, Editor(s)

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