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Proceedings Paper

MEMS for vibration energy harvesting
Author(s): Lin Li; Yangjian Zhang; Haisheng San; Yinbiao Guo; Xuyuan Chen
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Paper Abstract

In this paper, a capacitive vibration-to-electrical energy harvester was designed. An integrated process flow for fabricating the designed capacitive harvester is presented. For overcoming the disadvantage of depending on external power source in capacitive energy harvester, two parallel electrodes with different work functions are used as the two electrodes of the capacitor to generate a build-in voltage for initially charging the capacitor. The device is a sandwich structure of silicon layer in two glass layers with area of about 1 cm2. The silicon structure is fabricated by using silicon-on-insulator (SOI) wafer. The glass wafers are anodic bonded on to both sides of the SOI wafer to create a vacuum sealed package.

Paper Details

Date Published: 4 January 2008
PDF: 10 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683610 (4 January 2008); doi: 10.1117/12.756153
Show Author Affiliations
Lin Li, Xiamen Univ. (China)
Yangjian Zhang, Xiamen Univ. (China)
Haisheng San, Xiamen Univ. (China)
Yinbiao Guo, Xiamen Univ. (China)
Xuyuan Chen, Vestfold Univ. College (Norway)

Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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