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Proceedings Paper

Thin film synthesis of wurtzite boron nitride by femtosecond pulsed laser deposition
Author(s): Tasuku Shimizu; Takahiro Nakamura; Shunichi Sato
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Paper Abstract

Thin films of boron nitride were grown by femtosecond, pulsed laser deposition. The films were analyzed by transmission electron microscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. All the results indicated the presence of wurtzite phase in the thin film in contrast to usual phases such as cubic or hexagonal ones. Moreover, the electron diffraction pattern showed that the size of the wurtzite boron nitride crystallite was larger than 4 μm although boron nitride films reported so far consisted of small crystallites in the nanometer region.

Paper Details

Date Published: 1 August 2007
PDF: 8 pages
Proc. SPIE 6785, ROMOPTO 2006: Eighth Conference on Optics, 67850E (1 August 2007); doi: 10.1117/12.755970
Show Author Affiliations
Tasuku Shimizu, Tohoku Univ. (Japan)
Takahiro Nakamura, Tohoku Univ. (Japan)
Shunichi Sato, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 6785:
ROMOPTO 2006: Eighth Conference on Optics

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