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Proceedings Paper

Research of the digital coding mask based on digital micromirror device
Author(s): Bai Lu; YiQing Gao; NingNing Luo; LanLan Wei
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Paper Abstract

An approach, which is used to fabricate diffractive optical elements (MOEs), is presented by applying reduction projecting system based on digital micro-mirror device (DMD). In this paper, coding-mask is combined with DMD which is real-time, flexible and easy for alignment. Pre-distortion according to the non-linear effect in the aerial image and resist course can be implemented. The accumulation of exposure energy can be obtained through modulating rotating velocity of mask graphics, and finally distribution of exposure, which is required, can be achieved. It shows that the method is practical and feasible on the grounds of the results of MATLAB simulation and experiments.

Paper Details

Date Published: 4 January 2008
PDF: 8 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360V (4 January 2008); doi: 10.1117/12.755843
Show Author Affiliations
Bai Lu, Nanchang HangKong Univ. (China)
YiQing Gao, Nanchang HangKong Univ. (China)
NingNing Luo, Nanchang HangKong Univ. (China)
LanLan Wei, Nanchang HangKong Univ. (China)

Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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