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Proceedings Paper

A novel optical MEMS pressure sensor with a mesa diaphragm
Author(s): Yixian Ge; Ming Wang; Hua Rong; Xuxing Chen
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Paper Abstract

A novel pressure sensor with a mesa structure diaphragm based on microelectromechanical systems (MEMS) techniques is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Parot (F-P) cavity model and the relation between pressure and interference light intensity is deduced in the sensor. The mechanical model of the mesa structure diaphragm is validated by simulation, which declares that the mesa structure diaphragm is superior to the planar one on the depth of parallelism. Experimental system is also introduced.

Paper Details

Date Published: 4 January 2008
PDF: 9 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360R (4 January 2008); doi: 10.1117/12.755190
Show Author Affiliations
Yixian Ge, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)
Hua Rong, Nanjing Normal Univ. (China)
Xuxing Chen, Nanjing Normal Univ. (China)


Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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