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Proceedings Paper

The application of the FFT algorithm associated with CZT in the demodulation of Fabry-Perot pressure sensors
Author(s): Xiajuan Dai; Ming Wang; Yuhong Ben
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Paper Abstract

In this paper, the FFT (Fast Fourier Transform) demodulation method conbined with CZT(Chirp Z-Translation) is adopted here for Fabry-Perot pressure sensors and its principle and error are analyzed theoretically. CZT is a kind of DFT (Discrete Fourier Transform) in some special condition and it is usually used to thicken the frequency spectrum. CZT can do nothing to reduce the error from FFT and itself may induce error but the error here from FFT and CZT will influence the demodulation resolution a little. In the simulation, cavity lengthes from 397 to 403 μm with the space of 0.5 μm are simulated and the result shows that the relative error of this new method is less than 0.01% and the maximum absolute error is less than 0.05 μm. In the experiment of the demodulation of the MEMS Fabry-Perot pressure sensor, whose metrical range is from 0 to 3 Mpa, its resolution reaches 0.01 MPa, its linearity between the length of the cavity and pressure achieves 0.99316 and the standard deviation between measured pressures and real pressures is less than 0.005 Mpa. By the experiment we can see that this new method adapts to the practice demand with its higher resolution and less calculational quantity.

Paper Details

Date Published: 17 January 2008
PDF: 12 pages
Proc. SPIE 6830, Advanced Sensor Systems and Applications III, 683017 (17 January 2008); doi: 10.1117/12.755181
Show Author Affiliations
Xiajuan Dai, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)
Yuhong Ben, Nanjing Normal Univ. (China)

Published in SPIE Proceedings Vol. 6830:
Advanced Sensor Systems and Applications III
Yun-Jiang Rao; Yanbiao Liao; Gang-Ding Peng, Editor(s)

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