Femtosecond laser with 775nm wavelength and 150fs pulse width was empoyed to fabricate microstructures on a photosensitive glass (FOTURAN). The fabrication procedures included three steps: focused irradiation of femtosecond laser, programmed heat treatment and wet chemical etching in 8% ultrasonic solution of hydrofluoric acid for 50 minutes. By adopting appropriate incident laser parameters, including average power, numbers of pulses and scanning velocity, several fundamental microstructures had been fabricated on FOTURAN. The morphologies of these microstructures were analyzed by optical microscope, atomic force microscope and scanning electron microscope. Concave dots with smooth wall and several tens of microns in diameter are obtained on the surface. Microholes with circular cross-section and several tens microns in diameter are fabricated by femtosecond laser longitudinal writing mode, and currently the aspect ratio value above 8 is achieved. Femtosecond laser-induced index-refractive-change structures and shallow grooves are fabricated on the surface by transverse writing mode. The influences of incident laser parameters on final fabrication results are also experimentally characterized.

Date Published: 4 January 2008
PDF: 8 pages
Proc. SPIE 6825, Lasers in Material Processing and Manufacturing III, 68250I (4 January 2008); doi: 10.1117/12.755083

Published in SPIE Proceedings Vol. 6825:
Lasers in Material Processing and Manufacturing III
ShuShen Deng; Akira Matsunawa; Xiao Zhu, Editor(s)