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Proceedings Paper

New developments on polymer-based MEMS phase shifters
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Paper Abstract

Phase shifter is one of the core components for phased-array antennas which find wide applications in satellite systems, telecommunications, wireless systems, radar systems and tracking systems. The current high-frequency phase shifters are mainly built upon active semiconductor technologies which suffer from high fabrication and assembly costs. In this work, we propose a cost-effective approach to fabricate distributed MEMS transmission line phase shifters on a polymer-glass substrate. The fabrication procedure is compatible with CMOS and post-CMOS processes. The polymerglass phase shifter was characterized from DC to 26 GHz. The measurements show a phase shift of 120° and a 2.5-dB insertion loss at 26 GHz.

Paper Details

Date Published: 4 January 2008
PDF: 7 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360I (4 January 2008); doi: 10.1117/12.754991
Show Author Affiliations
Jianqun Wang, Univ. of Texas at Arlington (United States)
Thermpon Ativanichayaphong, Univ. of Texas at Arlington (United States)
Ying Cai, Univ. of Texas at Arlington (United States)
Wen-Ding Huang, Univ. of Texas at Arlington (United States)
Mu Chiao, Univ. of British Columbia (Canada)
J.-C. Chiao, Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)

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