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Proceedings Paper

Selective deposition of conductive copper films on glass surfaces using femtosecond laser surface modification and electroless plating
Author(s): Jian Xu; Yang Liao; Huidan Zeng; Zenghui Zhou; Haiyi Sun; Juan Song; Xinshun Wang; Ya Cheng; Zhizhan Xu; Koji Sugioka; Katsumi Midorikawa
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Paper Abstract

In this paper, selective deposition of conductive copper films on glass surfaces is demonstrated with the assistance of femtosecond laser surface modification followed by electroless plating. Irradiation of femtosecond laser makes it possible to selectively deposit copper films in the irradiated area on glass surfaces coated with silver nitrate films. The influence of the laser direct writing parameters and the electroless plating process on the formation of copper films is discussed. Meanwhile, the electric properties of copper films are investigated, which confirms that copper films are conductive. A tentative mechanism of the selective deposition process is also proposed. In addition, the potential application of this technique for integrating electrical and thermal functions into microdevices is discussed.

Paper Details

Date Published: 4 January 2008
PDF: 5 pages
Proc. SPIE 6825, Lasers in Material Processing and Manufacturing III, 68250L (4 January 2008); doi: 10.1117/12.754877
Show Author Affiliations
Jian Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Yang Liao, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Huidan Zeng, East China Univ. of Science and Technology (China)
Zenghui Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Haiyi Sun, Shanghai Institute of Optics and Fine Mechanics (China)
Juan Song, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Xinshun Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Ya Cheng, Shanghai Institute of Optics and Fine Mechanics (China)
Zhizhan Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Koji Sugioka, Laser Technology Lab., RIKEN (Japan)
Katsumi Midorikawa, Laser Technology Lab., RIKEN (Japan)


Published in SPIE Proceedings Vol. 6825:
Lasers in Material Processing and Manufacturing III
ShuShen Deng; Akira Matsunawa; Xiao Zhu, Editor(s)

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